Patent Assignment
Reel/Frame 029206/0760
Assignment of Assignor's Interest
Recorded: 2012-10-29
Pages: 4
Assignors
NAKAHARADA, MASAHIRO
Executed: 2012-10-15
SAKATA, YOJI
Executed: 2012-10-15
MIYATA, AKIRA
Executed: 2012-10-15
HAYASHI, SHINICHI
Executed: 2012-10-19
ENOKIDA, SUGURU
Executed: 2012-10-15
NAKASHIMA, TSUNENAGA
Executed: 2012-10-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Treatment System, Substrate Transfer Method, and a Non-Transitory Computer Storage Medium