Patent Assignment
Reel/Frame 029236/0263
Assignment of Assignor's Interest
Recorded: 2012-11-02
Pages: 3
Assignors
SWAMINATHAN, SHANKAR
Executed: 2012-10-12
SRIRAM, MANDYAM
Executed: 2012-10-15
VAN SCHRAVENDIJK, BART
Executed: 2012-10-15
SUBRAMONIUM, PRAMOD
Executed: 2012-10-16
LAVOIE, ADRIEN
Executed: 2012-10-12
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Conformal Doping via Plasma Activated Atomic Layer Deposition and Conformal Film Deposition