Patent Assignment
Reel/Frame 029251/0979
Assignment of Assignor's Interest
Recorded: 2012-11-06
Pages: 3
Assignor
BROWN, IAN J
Executed: 2012-11-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 6-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Stripping Photoresist on a Single Substrate System