Patent Assignment
Reel/Frame 029253/0866
Assignment of Assignor's Interest
Recorded: 2012-11-07
Pages: 4
Assignors
MAJOR, ANDRAS G.
Executed: 2012-10-25
MAUL, MANFRED
Executed: 2012-10-23
WEISS, GUNDULA
Executed: 2012-10-12
HETZLER, JOCHEN
Executed: 2012-10-12
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus