Patent Assignment
Reel/Frame 029267/0838
Assignment of Assignor's Interest
Recorded: 2012-11-09
Pages: 3
Assignor
TERASHIMA, SHIGERU
Executed: 2012-06-26
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Charged Particle Beam Drawing Apparatus, and Method of Manufacturing Article