Patent Assignment
Reel/Frame 029268/0261
Assignment of Assignor's Interest
Recorded: 2012-11-09
Pages: 5
Assignors
VAN DER SANDEN, STEFAN CORNELIS THEODORUS
Executed: 2012-09-28
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2012-09-28
SIMONS, HUBERTUS JOHANNES GERTRUDUS
Executed: 2012-09-20
EDART, REMI DANIEL MARIE
Executed: 2012-10-01
WEI, XIUHONG
Executed: 2012-09-28
KUBIS, MICHAEL
Executed: 2012-09-28
LYULINA, IRINA
Executed: 2012-09-20
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods