Patent Assignment
Reel/Frame 029283/0255
Assignment of Assignor's Interest
Recorded: 2012-11-12
Pages: 3
Assignors
ZHANG, JIMIN
Executed: 2012-08-21
LEE, HARRY Q.
Executed: 2012-08-21
WANG, ZHIHONG
Executed: 2012-08-21
TU, WEN-CHIANG
Executed: 2012-08-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Endpoint Detection During Polishing Using Integrated Differential Intensity