Patent Assignment
Reel/Frame 029302/0346
Assignment of Assignor's Interest
Recorded: 2012-11-15
Pages: 2
Assignors
MATSUMOTO, SHUHEI
Executed: 2012-11-08
IWANAGA, SHUJI
Executed: 2012-11-08
TOMITA, HIROSHI
Executed: 2012-11-08
NAKAMIZO, KENJI
Executed: 2012-11-08
MORITA, SATOSHI
Executed: 2012-11-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Computer Readable Storage Medium Storing Substrate Processing Program