Assignment of Assignor's Interest

Recorded: 2012-11-15 Pages: 4

Assignor

YAMAZAWA, YOHEI

Executed: 2012-05-24

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME,, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Plasma Processing Apparatus and Plasma Processing Method

Application: 13/434,802 →

Publication: US 2012/0248066