Patent Assignment
Reel/Frame 029303/0736
Assignment of Assignor's Interest
Recorded: 2012-11-15
Pages: 3
Assignors
EGI, YUJI
Executed: 2012-10-31
SUZAWA, HIDEOMI
Executed: 2012-11-05
SASAGAWA, SHINYA
Executed: 2012-11-01
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device