Patent Assignment
Reel/Frame 029315/0201
Assignment of Assignor's Interest
Recorded: 2012-11-16
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Insulation Film Using Non-Halide Precursor Having Four or More Silicons