Patent Assignment
Reel/Frame 029355/0251
Assignment of Assignor's Interest
Recorded: 2012-11-27
Pages: 3
Assignors
WILLWERTH, MICHAEL D.
Executed: 2012-11-20
PALAGASHVILI, DAVID
Executed: 2012-11-20
CHAFIN, MICHAEL G.
Executed: 2012-11-19
LIN, YING-SHENG
Executed: 2012-11-22
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Plasma Reactor Electrostatic Chuck with Cooled Process Ring and Heated Workpiece Support Surface