Patent Assignment
Reel/Frame 029370/0355
Assignment of Assignor's Interest
Recorded: 2012-11-29
Pages: 3
Assignors
HE, ZHIAN
Executed: 2012-11-21
PORTER, DAVID W.
Executed: 2012-11-21
REID, JONATHAN D.
Executed: 2012-11-25
WILMOT, FREDERICK D.
Executed: 2012-11-21
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Dynamic Current Distribution Control Apparatus and Method for Wafer Electroplating