Patent Assignment
Reel/Frame 029398/0079
Assignment of Assignor's Interest
Recorded: 2012-12-04
Pages: 4
Assignor
KOO, BON-WOONG
Executed: 2012-11-30
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Plasma Uniformity Control Using Biased Array