Patent Assignment
Reel/Frame 029411/0207
Assignment of Assignor's Interest
Recorded: 2012-12-05
Pages: 3
Assignor
AKADA, HIKARU
Executed: 2012-11-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Data Acquisition Method in Substrate Processing Apparatus and Sensor Substrate