Patent Assignment
Reel/Frame 029418/0198
Assignment of Assignor's Interest
Recorded: 2012-12-06
Pages: 8
Assignors
WATERMAN, AARON ARCHER
Executed: 2012-11-26
MOROZUMI, YUICHIRO
Executed: 2012-12-03
OZAKI, TETSUSHI
Executed: 2012-12-03
KAUSHAL, SANJEEV
Executed: 2012-12-02
PATEL, SUKESH JANUBHAI
Executed: 2012-11-26
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Autonomous Identification of Particle Contamination Due to Isolated Process Events and Systematic Trends