Assignment of Assignor's Interest

Recorded: 2012-12-06 Pages: 3

Assignors

TOUYA, TAKANAO

Executed: 2012-11-16

OGASAWARA, MUNEHIRO

Executed: 2012-11-19

Assignee

NUFLARE TECHNOLOGY, INC.

2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN

Covered Property (1)

Charged Particle Beam Writing Apparatus and Charged Particle Beam Writing Method

Patent: 8,791,422 →

Application: 13/706,903 →

Publication: US 2013/0149646