Patent Assignment
Reel/Frame 029424/0520
Assignment of Assignor's Interest
Recorded: 2012-12-07
Pages: 4
Assignors
LIN, YI-AN
Executed: 2012-11-30
CHANG, CHUN-WEI
Executed: 2012-11-30
CHEN, NENG-KUO
Executed: 2012-11-30
SUN, SEY-PING
Executed: 2012-12-04
WAN, CLEMENT HSINGJEN
Executed: 2012-12-05
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Removing Hard Mask Oxide and Making Gate Structure of Semiconductor Devices