Patent Assignment
Reel/Frame 029438/0673
Assignment of Assignor's Interest
Recorded: 2012-12-10
Pages: 8
Assignors
EHM, DIRK HEINRICH
Executed: 2012-12-05
VAN KAMPEN, MAARTEN
Executed: 2012-10-02
SCHMIDT, STEFAN-WOLFGANG
Executed: 2012-12-10
BANINE, VADIM YEVGENYEVICH
Executed: 2012-10-22
LOOPSTRA, ERIK
Executed: 2012-09-21
Assignees
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, 5504 DR, NETHERLANDS
Covered Property
(1)
Arrangement for Use in a Projection Exposure Tool for Microlithography Having a Reflective Optical Element