Patent Assignment
Reel/Frame 029445/0968
Assignment of Assignor's Interest
Recorded: 2012-12-11
Pages: 3
Assignors
BANNA, SAMER
Executed: 2012-10-29
CHEN, ZHIGANG
Executed: 2012-10-29
TODOROW, VALENTIN
Executed: 2012-10-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Inductively Coupled Plasma Source with Phase Control