Patent Assignment
Reel/Frame 029457/0968
Assignment of Assignor's Interest
Recorded: 2012-12-12
Pages: 3
Assignors
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2012-10-25
PELLEMANS, HENRICUS PETRUS MARIA
Executed: 2012-10-25
VAN DER SCHAAR, MAURITS
Executed: 2012-10-25
VANOPPEN, PETER CLEMENT PAUL
Executed: 2012-10-25
KUBIS, MICHAEL
Executed: 2012-10-25
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, and Device Manufacturing Method