Patent Assignment
Reel/Frame 029497/0538
Assignment of Assignor's Interest
Recorded: 2012-12-19
Pages: 2
Assignor
UTZNY, CLEMENS, DR.
Executed: 2012-11-25
Assignee
ADVANCED MASK TECHNOLOGY CENTER GMBH & CO. KG
RAEHNITZER ALLEE 9, DRESDEN, 01109, GERMANY
Covered Property
(1)
Euv Mask Set and Methods of Manufacturing Euv Masks and Integrated Circuits