Patent Assignment
Reel/Frame 029511/0415
Assignment of Assignor's Interest
Recorded: 2012-12-20
Pages: 5
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel
Application:
13/672,156 →
Publication:
US 2013/0118589