IP Library Patent Application 13672156
Patent Application
App. No. 13/672,156

Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel

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Quick Facts
Patent No.
US None
App. No.
13/672,156
Abstract

An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

Claims (40)

1 . An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:

a toroidal plasma chamber, wherein the toroidal plasma chamber comprises an injection member, an output member, a first side member and a second side member, the first and second side members connecting the injection member and output member, wherein:

the first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, the first inner cross-sectional area and the second inner-cross-sectional area being different, and

the second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, the third inner cross-sectional area and the fourth inner-cross-sectional area being different; and

a gas injector for injecting gas into the toroidal plasma chamber through the injection member, the injection of gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber.

2 . The assembly of claim 1 , wherein the first inner cross-sectional area and the third inner cross-sectional area are the same.

3 . The assembly of claim 1 , wherein the first side member and the second side member have a complementary shape.

4 . The assembly of claim 3 , wherein the first side member and the second side member are parallel.

5 . The assembly of claim 1 , wherein an inner cross-sectional area along the first side member and an inner cross-sectional area along the second side member are connected in a smooth contour for continuous fluid flow.

6 . The assembly of claim 1 , wherein first inner cross-sectional area and the third inner cross-sectional area are in the range of 2 to 50 cm 2 .

7 . The assembly of claim 1 , wherein the second inner cross-sectional area and the fourth inner cross-sectional area are in the range of 3 to 80 cm 2 .

8 . The assembly of claim 1 , wherein the first inner cross-sectional area and the third inner cross-sectional area are downstream of the second inner cross-sectional area and the fourth inner cross-sectional area, respectively, along the toroidal plasma chamber.

9 . The assembly of claim 1 , wherein both the first side member and the second side member are connected to the injection member and the output member with connectors that create a vacuum seal to prevent leakage of gas and plasma and an electric break.

10 . The assembly of claim 9 , wherein the connectors are fluid cooled.

11 . The assembly of claim 1 , wherein the first side member and the second side member are removable.

12 . An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:

a toroidal plasma chamber, wherein the toroidal plasma chamber comprises an injection member, an output member, a first side member and a second side member, the first and second side members connecting the injection member and output member, wherein:

the first side member has an inner cross-sectional area that is different from the inner cross-sectional area of the second side member; and

a gas injector for injecting gas into the toroidal plasma chamber through the injection member, the injection of gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber.

13 . A kit for constructing a toroidal plasma chamber, the kit comprising:

an injection member capable of receiving and delivering a gas;

an output member capable of allowing disassociated gas to flow out of the toroidal plasma chamber;

a first side member capable of allowing gas and plasma to flow through, the first side member having a first inner cross-sectional area in at least a first portion, the first inner cross-sectional area smaller than an inner cross-sectional area of a connecting portion of either the injection member or the output member;

a second side member capable of allowing gas and plasma to flow through, the second side member having a second inner cross-sectional area in at least a second portion, the second inner cross-sectional area smaller than an inner cross-sectional area of a connecting portion of either the injection member or the output member; and

water cooled connectors, the water cooled connectors creating a vacuum seal to prevent leakage of gas and plasma, and an electric break.

14 . The kit of claim 13 , wherein the first side member and the second side member are removable.

15 . A method for adjusting gas flow patterns and gas-plasma interactions, the method comprising:

inserting a first side member into a toroidal plasma chamber having a first inner cross-sectional area based on a first predetermined size of a plasma;

inserting a second side member into a toroidal plasma chamber having a second inner cross-sectional area based on a second predetermined size of a plasma;

injecting a gas into the toroidal plasma chamber through an injection member;

causing a flow of gas within the toroidal plasma chamber; and

generating plasma within the toroidal plasma chamber such that plasma flows through an opening of the first side member and through an opening of the second side member.

16 . The method of claim 15 , wherein the first and the second predetermined plasma size substantially matches the size of plasma that is flowing through the toroidal plasma chamber.

17 . A method for replacing a side member of a toroidal plasma chamber, the method comprising:

removing a first connector connecting a first side member and an injection member;

removing a second connector connecting the first side member and an output member;

removing the first side member from the toroidal plasma chamber;

installing a second side member into the toroidal plasma chamber, the second side member being a replacement of the first side member;

installing the first connector to connect the second side member and the injection member; and

installing the second connector to connect the second side member and the output member.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 20, 2012
From: HU, CHAOLIN; CHEN, XING
To: MKS INSTRUMENTS, INC.
Reel/Frame 029511/0415 →