Patent Assignment
Reel/Frame 029530/0963
Assignment of Assignor's Interest
Recorded: 2012-12-27
Pages: 3
Assignor
TAKEDA, TSUYOSHI
Executed: 2012-09-26
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.