Patent Assignment
Reel/Frame 029561/0531
Assignment of Assignor's Interest
Recorded: 2013-01-03
Pages: 7
Assignors
YOSHIHARA, KOUSUKE
Executed: 2012-12-10
TANAKA, KEIICHI
Executed: 2012-12-25
ICHINOMIYA, HIROSHI
Executed: 2012-12-25
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Cleaning Method, Substrate Cleaning Apparatus and Storage Medium for Cleaning Substrate