Patent Assignment
Reel/Frame 029620/0361
Assignment of Assignor's Interest
Recorded: 2013-01-14
Pages: 3
Assignor
PATRICK, ROGER
Executed: 2012-12-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Diagnosing Status of Parts in Real Time in Plasma Processing Equipment