Patent Assignment
Reel/Frame 029629/0865
Assignment of Assignor's Interest
Recorded: 2013-01-15
Pages: 5
Assignors
MATSUMOTO, TAKASHI
Executed: 2012-10-31
SUGIURA, MASAHITO
Executed: 2012-10-31
KOIZUMI, KENJIRO
Executed: 2012-10-31
KASHIWAGI, YUSAKU
Executed: 2012-10-31
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Forming Carbon Nanotubes and Carbon Nanotube Film Forming Apparatus