Patent Assignment
Reel/Frame 029632/0927
Assignment of Assignor's Interest
Recorded: 2013-01-15
Pages: 10
Assignors
WEI, XIUHONG
Executed: 2012-11-09
BIJNEN, FRANCISCUS GODEFRIDUS CASPER
Executed: 2012-11-13
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2012-11-09
VAN DE KERKHOF, MARCUS ADRIANUS
Executed: 2012-11-09
MOS, EVERHARDUS CORNELIS
Executed: 2012-11-17
SIMONS, HUBERTUS JOHANNES GERTRUDUS
Executed: 2012-11-12
EDART, REMI DANIEL MARIE
Executed: 2012-11-09
DECKERS, DAVID
Executed: 2012-11-12
SCHOUMANS, NICOLE
Executed: 2012-11-09
LYULINA, IRINA
Executed: 2012-11-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus