Patent Assignment
Reel/Frame 029641/0385
Assignment of Assignor's Interest
Recorded: 2013-01-16
Pages: 8
Assignors
CHIMMALGI, ANANT
Executed: 2012-12-12
SHCHEMELININ, ANATOLY
Executed: 2012-12-10
BEZEL, ILYA
Executed: 2012-12-10
PATIL, RAJEEV
Executed: 2013-01-15
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Plasma Cell for Laser-Sustained Plasma Light Source