Patent Assignment
Reel/Frame 029663/0519
Assignment of Assignor's Interest
Recorded: 2013-01-21
Pages: 5
Assignors
SUZUKI, KEISUKE
Executed: 2012-12-26
KADONAGA, KENTARO
Executed: 2012-12-26
LEE, BYOUNG HOON
Executed: 2012-12-21
LEE, EUN JO
Executed: 2012-12-21
SON, SUNG DUK
Executed: 2012-12-21
JANG, JAE HYUK
Executed: 2012-12-21
PARK, DO HYUN
Executed: 2012-12-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming Silicon Oxycarbonitride Film