Patent Assignment
Reel/Frame 029666/0680
Assignment of Assignor's Interest
Recorded: 2013-01-22
Pages: 5
Assignors
LIU, YU-LUN
Executed: 2012-10-30
LIU, CHIA-CHU
Executed: 2012-10-30
CHEN, KUEI-SHUN
Executed: 2012-10-30
WANG, CHUNG-MING
Executed: 2012-10-30
LIN, CHIE-CHIEH
Executed: 2012-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Improving Resist Pattern Peeling