Patent Assignment
Reel/Frame 029667/0618
Assignment of Assignor's Interest
Recorded: 2013-01-22
Pages: 4
Assignors
TAKAHASHI, GORO
Executed: 2013-01-16
KASAI, TAKAHITO
Executed: 2013-01-16
SAITO, TAKANORI
Executed: 2013-01-16
WANG, WENLING
Executed: 2013-01-18
YOSHII, KOJI
Executed: 2013-01-16
YAMAGUCHI, TATSUYA
Executed: 2013-01-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Heat Treatment Apparatus and Method of Controlling the Same