Patent Assignment
Reel/Frame 029674/0348
Assignment of Assignor's Interest
Recorded: 2013-01-22
Pages: 9
Assignors
HIROSE, YOSHIRO
Executed: 2012-12-13
SANO, ATSUSHI
Executed: 2012-12-13
YANAGITA, KAZUTAKA
Executed: 2012-12-14
HIGASHINO, KATSUKO
Executed: 2012-12-14
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
L'AIR LIQUIDE-SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75, QUAI D'ORSAY, F-75007, PARIS, FRANCE
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.