Patent Assignment
Reel/Frame 029677/0252
Assignment of Assignor's Interest
Recorded: 2013-01-23
Pages: 3
Assignors
HSU, CHIN-CHANG
Executed: 2013-01-21
LIN, HUNGLUNG
Executed: 2013-01-21
SHEN, YING-YU
Executed: 2013-01-21
YANG, WEN-JU
Executed: 2013-01-21
HSIEH, KEN-HSIEN
Executed: 2013-01-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Conflict Detection for Self-Aligned Multiple Patterning Compliance