Patent Assignment
Reel/Frame 029686/0432
Assignment of Assignor's Interest
Recorded: 2013-01-24
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and System of Process Chemical Temperature Control Using an Injection Nozzle