Patent Assignment
Reel/Frame 029698/0619
Assignment of Assignor's Interest
Recorded: 2013-01-07
Pages: 3
Assignors
NAMBA, HIROMITSU
Executed: 2012-12-28
FITRIANTO
Executed: 2012-12-24
TOKUNAGA, YOICHI
Executed: 2012-12-28
AMANO, YOSHIFUMI
Executed: 2012-12-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method