Patent Assignment
Reel/Frame 029699/0542
Assignment of Assignor's Interest
Recorded: 2013-01-26
Pages: 5
Assignors
YIN, HUAXIANG
Executed: 2013-01-25
YAN, JIANG
Executed: 2013-01-25
CHEN, DAPENG
Executed: 2013-01-25
Assignee
THE INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAO YANG DISTRICT, BEIJING, 100029, CHINA
Covered Property
(1)
A Method of Manufacturing Semiconductor Device