Patent Assignment
Reel/Frame 029708/0595
Assignment of Assignor's Interest
Recorded: 2013-01-29
Pages: 3
Assignors
TSEN, YEN-DI
Executed: 2012-12-17
LU, SHIN-RUNG
Executed: 2012-12-17
MOU, JONG-I
Executed: 2012-12-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Scanner Overlay Correction System and Method