Patent Assignment
Reel/Frame 029709/0915
Assignment of Assignor's Interest
Recorded: 2013-01-29
Pages: 2
Assignors
HAYASHI, TOKUTAROU
Executed: 2013-01-15
DOUKI, YUICHI
Executed: 2013-01-15
MAEJIMA, HIROMITSU
Executed: 2013-01-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus, Substrate Transfer Method, and Non-Transitory Storage Medium