Patent Assignment
Reel/Frame 029714/0796
Assignment of Assignor's Interest
Recorded: 2013-01-29
Pages: 3
Assignor
CHU, YUAN-CHIH
Executed: 2012-10-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus and Method for Lithography Patterning