Patent Assignment
Reel/Frame 029723/0730
Assignment of Assignor's Interest
Recorded: 2013-01-30
Pages: 4
Assignor
MIZUGUCHI, YASUHIRO
Executed: 2013-01-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, Non-Transitory Computer-Readable Recording Medium, and Substrate Transfer Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.