Patent Assignment
Reel/Frame 029727/0545
Assignment of Assignor's Interest
Recorded: 2013-01-31
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Self-Aligned Deep Trench Capacitor, and Method for Making the Same