Patent Assignment
Reel/Frame 029729/0767
Assignment of Assignor's Interest
Recorded: 2013-01-31
Pages: 3
Assignor
OONO, SHIGEMI
Executed: 2013-01-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method and Storage Medium