Patent Assignment
Reel/Frame 029745/0666
Assignment of Assignor's Interest
Recorded: 2013-02-04
Pages: 3
Assignors
KAISE, SEIICHI
Executed: 2013-01-22
AMEMIYA, SHIGEKI
Executed: 2013-01-22
ONODERA, SHINOBU
Executed: 2013-01-22
FUJITA, HIROKI
Executed: 2013-01-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Purging a Substrate Container
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.