Patent Assignment
Reel/Frame 029748/0651
Assignment of Assignor's Interest
Recorded: 2013-02-04
Pages: 3
Assignor
ISHIBASHI, TOMOATSU
Executed: 2013-01-09
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Cleaning Method