Patent Assignment
Reel/Frame 029755/0191
Assignment of Assignor's Interest
Recorded: 2013-02-05
Pages: 10
Assignors
KOBAYASHI, YOICHI
Executed: 2012-12-02
OHTA, SHINROU
Executed: 2012-12-05
KIMBA, TOSHIFUMI
Executed: 2012-12-05
KINOSHITA, MASAKI
Executed: 2012-12-05
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Making Diagram for Use in Selection of Wavelength of Light for Polishing Endpoint Detection, Method and Apparatus for Selecting Wavelength of Light for Polishing Endpoint Detection, Polishing Endpoint Detection Method, Polishing Endpoint Detection Apparat