Patent Assignment
Reel/Frame 029765/0677
Assignment of Assignor's Interest
Recorded: 2013-02-06
Pages: 2
Assignors
LONG, MAOLIN
Executed: 2013-01-24
MARSH, RICKY
Executed: 2013-01-24
PATERSON, ALEX
Executed: 2013-01-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tcct Match Circuit for Plasma Etch Chambers