Patent Assignment
Reel/Frame 029769/0939
Assignment of Assignor's Interest
Recorded: 2013-02-07
Pages: 2
Assignors
YOSHIDA, ATSUSHI
Executed: 2012-12-19
YAMAMOTO, NAOHIRO
Executed: 2012-12-19
SUYAMA, MAKOTO
Executed: 2012-12-19
YAMADA, KENTARO
Executed: 2012-12-19
FUJITA, DAISUKE
Executed: 2012-12-19
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Etching Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.