Patent Assignment
Reel/Frame 029779/0601
Assignment of Assignor's Interest
Recorded: 2013-01-25
Pages: 5
Assignors
OGIHARA, TSUTOMU
Executed: 2012-12-03
UEDA, TAKAFUMI
Executed: 2012-12-03
TANEDA, YOSHINORI
Executed: 2012-12-03
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME,, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Silicon-Containing Surface Modifier, Resist Lower Layer Film-Forming Composition Containing the Same, and Patterning Process